Page 46 - Technology Compendium

CSIR-IMMT/MAT - 06

Microplasma device

Advantages / Salient Technical Features Application/Uses
• Plasma is generated mostly under low pressures in a • Plasma displays, plasma medicine, triboelec-
large volume to keep uniform distribution over a large tric nanomaterials’ synthesis, gas treatment,
area. But micro plasmas are typically generated at etching processes, excimer sources, spec-
elevated pressure to atmospheric pressure or higher. troscopy of gases, analytical chemistry.

Problem being addressed Scale of Development
• The fabrication of a cathode material that can • Lab scale. (Current TRL Level : 03)
proficiently emit electrons for the aim of improving
the luminous efficiency of a micro plasma device is of Commercialization Status
prime importance. Hence, hunt for a suitable cathode
material has begun, in which the material can enhance • Yet to be commercialized, requires scale up
the plasma characteristics and enhance the long-term facilities
sustainability of plasma discharges.
Techno-economics
Environmental Considerations (if any) • NA
• Environmental friendly
Technology Package
Major Raw Materials to be Utilized • NA
• Fabricated Equipment

IPR Status / Details (India/Abroad)

• NO IPR

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